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ACM News
Tiny 3D Chips
![[article image]](/system/assets/0000/7270/22912.mitnews.3d_chips.large.jpg?1330534864&1330534863 "3D chips")
A new approach helps researchers make tiny 3D structures. Pictured are two packaged microchips, each with tiny bridges fabricated on their surfaces.
Credit: MIT
Microelectromechanical systems, or MEMS, are small devices with huge potential. Typically made of components less than 100 microns in size—the diameter of a human hair—they have been used as tiny biological sensors, accelerometers, gyroscopes, and actuators.
From MIT News Office
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